Plasma modifications and PECVD of injection mold surface for forming automobile plastic parts.
Low friction and wear-resistant applications using plama nitriding and DLC deposition to various types of metal products.
Special Features
Batch type of large area plasma treatment, plasma nitriding & PECVD system.
(chamber size: ID:2,100mm, L:3,100mm, sample loading: max. 10tons)
Specialized in sequential process of plasma treatment (or plasma nitriding) and diamondlike carbon deposition using bias plasma.
Automatically controlled with PC interface.
Convenient sample loading with sample loading carrier.
Specifications
Base pressure : ~10-6Torr
Selectable working pressure (~mTorr to ~Torr)
Average throughput : Up to 3,000 ton per year
Dimension : 9,900W x 2,600D x 4,160H (mm3)
Heater : 5.3 kW 48EA, 250kW
Power : Power Supply MAP300
Gas : H2/ N2/ Ar/ O2/ CH4/ C2H2
Pump : Diffusion pump, 22inch, 2Set(Booster pump : 23,000 l/min, Rotary pump : 9,000 l/min)
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