Large scale of plasma surface Modification and PECVD system

Large scale of plasma surface Modification and PECVD system

Large scale of plasma surface Modification and PECVD system Made in Korea

Description

Plasma modifications and PECVD of injection mold surface for forming automobile plastic parts.

Low friction and wear-resistant applications using plama nitriding and DLC deposition to various types of metal products.

Special Features

Batch type of large area plasma treatment, plasma nitriding & PECVD system.

(chamber size: ID:2,100mm, L:3,100mm, sample loading: max. 10tons)

Specialized in sequential process of plasma treatment (or plasma nitriding) and diamondlike carbon deposition using bias plasma.

Automatically controlled with PC interface.

Convenient sample loading with sample loading carrier.

Specifications

Base pressure : ~10-6Torr

Selectable working pressure (~mTorr to ~Torr)

Average throughput : Up to 3,000 ton per year

Dimension : 9,900W x 2,600D x 4,160H (mm3)

Heater : 5.3 kW 48EA, 250kW

Power : Power Supply MAP300

Gas : H2/ N2/ Ar/ O2/ CH4/ C2H2

Pump : Diffusion pump, 22inch, 2Set(Booster pump : 23,000 l/min, Rotary pump : 9,000 l/min)


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