Diaphragm Metalligations
Special Features
Roll to Roll System for mass production.
PC control based on PLC.
Metal deposition on flexible film
Flexible film thickness: 2um
Speedy deposition and throughput
Loading capacity : 5km per day
Average throughput 1,800km per year
Specifications
Dimension : 2,714L x 3,393H x 2,008W (mm3)
Chamber body : Ø800×800H
Power : Sputter : DC pulse 10kW
E-beam Evaporation : E-BEAM 15kW
Gas : Ar, N2
Pump : Rotary(3,200 l/min) & Booster(6,000 l/min) & Cryo pump(10,000 l/sec)
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