Roll-to-roll sputter system for the flexible solar cell
The system apparatus for depositing the base electrode / TCO top layer of flexible solar cell.
This equipment which forms the base electrode of flexible solar cell is equipped with the plasma cathode that has the power density for the deposition process. The system is able to produce the flexible solar cell that maximizes the efficiency.
- Film specification : 334mmW x 600M x 50um
- Power supply specification : 220 ~ 480Vac, 3 phase, 50 ~ 60Hz
- Plasma power supply : DC, Pulsed DC, MF
- Use the plasma treatment for treatment on the surface of film
- Deposition materials : Metal and Oxide-type, Nitride-type
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