SiH2Cl2 Dichlorosilane

SiH2Cl2 Dichlorosilane

SiH2Cl2 Dichlorosilane Made in Korea

Description

"Something Different! So Different!"SiH2Cl2 Dichlorosilane ? Application -SiH2Cl2 is silicon precursor gas used in combination with ammonia for silicon nitride chemical vapor deposition (CVD). SiH2Cl2 is also used for epitaxial silicon deposition. ? Specification   Specification Analyzer Purity SiH2Cl2 99.9%   Impurity(ppmv) O2 + Ar = 1.0 GC N2 = 1.0 GC CO = 1.0 GC CO2 = 1.0 GC CH4 = 1.0 GC HC = 10.0 GC SiH3Cl = 500 GC SiHCl3 = 500 GC SiCl4 = 500 GC ? Package Type Material Filling Weight (Max.) Valve Connection Type 40L SUS 316L 37kg JIS 22-14LDISS 636 10L SUS 316L 9kg  

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