WF6 Tungsten Hexafluoride

WF6 Tungsten Hexafluoride

WF6 Tungsten Hexafluoride Made in Korea

Description

"something different! so different!"WF6 Tungsten hexafluoride ? Application - WF6 is used a source gas of tungsten in semiconductor production.- Used to increase the speed of process or to link elements in semiconductor production process. ? Specification Item Specification   Purity WF6 99.9995% Impurity Gas-1 (ppmv) O2 + Ar < 1.0 N2 < 1.0 Gas-2 (ppmw) HF < 1.0 Metal(ppbw) Na < 10 Mg < 10 Al < 10 K < 10 Ca < 15 Cr < 10 Fe < 10 Ni < 10 Cu < 10 Mo < 25 Th < 0.1 U < 0.1 Zn < 10 ? Package Volume Material Filling Weight (Max.) Valve Connection Type 40L SUS 316L 100kg JIS 22R,CGA 638,CGA 670 20L 50kg 10L 25kg 3.4L 8kg  

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