NF3 Nitrogen Trifluoride

NF3 Nitrogen Trifluoride

NF3 Nitrogen Trifluoride Made in Korea

Description

"something different! so different!"NF3 Nitrogen Trifluoride ? Application - Used for cleaning CVD Chamber or etching vapor deposition layer(film) during the production process of semiconductor, TFT-LCD and solar cell. ? Specification Item Specification Purity NF3 99.999% Impurity(ppmv) O2 + Ar < 1.0 N2 < 1.0 CF4 < 10.0 CO2 < 1.0 N2O < 1.0 SF6 < 1.0 CO < 1.0 HF < 1.0 H2O < 1.0 ? Package Type Material Filling Weight (Max.) Valve Connection Type 47L Mn Steel 22.7Kg DISS 640,CGA 330,JIS 22R/L Bundle 500Kg DISS 640 Ton-Cylinder Cr-Mo Steel 200Kg ISO Container 4,200Kg/8,000Kg  

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