TFT-LCD clean Stocker System

Stocker is being used by semiconductor and TFT - LCD manufature to store and buffer cassette with substrates in process. Since an important function of stocker is to keep the contained material clean, the only way to keepthe stored product clean is to provide contant clean airflow through stocker. This system consists of input and output conveyor for loading and unloading of cassettes, shelf for storage of cassettes, stacker machine(robot)to transfer cassette between conveyor and rack, and airflow system to maintain cleanness inside stocker.  Concept for Stocker System- Developed and installde for 5" generation TFT-LCD- High speed High reliability stacker   Direct wheel driver   Max. 120m/min speed (with cassette)   Max 150kg cassette transport    With 8sec Forking Time - Non- contact power supply   Eliminate particle source - New air contril methods   Guarantee 0.1µ class 10   Without side fan filter unit   Static pressure regain theory- Taller stocker(Above 7m)   High space effciency  Concept for stocker Controller- Easy to operation with Graphic Use Interface and   Touch Monitor- SEMI international standard communication with   MCS - Use WIN2000 NT for OS- Non-stop operation during correcting system- Easy to maintenance with error message log- Password for security- Teaching pendant for operating units Transfer conveyor is veing used by TFT-LCD Manufactures to Transfer and Buffer cassette between one and another Bay in stead of conventional inter-bay system  Concept- Inter-bay transfer equipment- Both sides transfer- Max. 60sec cycle time - Cassette buffer system- Lot information management- Stock SEMI interface to MCS