Speccification- Hardware Performance -
1-1 MTBF: > 500 Hours
1-2 MTTR: > 2 Hours
1-3 Up-Time: 95%
1-4 Through-put: 70Wafer(2Chamber)
1-5 Oxidant Control: min 3.0ppm
1-6 particle: < 0.04/?, 0.16?
- Reactor Chamber -
2-1 Max Temperature: 1250?
2-2 Temperature Ramp-Up rate: 30~120?/sec
2-3 Temperature Down rate: 10~50/sec
2-4 Temperature Repeatability: < ± 2.0?
2-5 Temperature Control Range: 400~1200?
2-6 Source Life Time: > 1000Hrs
- Heating Pervformance -
3-1 Lamp Type: Circular Type
3-2 Temperature Control Method: Open/Close Loop(9Zone)
3-3 Temperature Uniformity: < ± 20.?(at 1000?)
- Process gas supply system -
4-1 Accuracy of flow rate: set flow < ± 10.?%
4-2 Gas distribution box: 3Gas Channel(Ar,PN2, O2)
- Applicatiion Process -
5-1 IMP Anneal: OK(Rs Uniformity: < 1.0%)
5-2 BPSG Reflow: OK
5-3 Barrier Metal Anneal: OK
Rapid Thermal Anneal
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Payment & Shipping Conditions:
- Payment: We accept payment through Paypal Only.
- Shipping: We will ship the catalog once the payment is received. And you will be receiving the catalog with in 10 -14 busines days. Shipping might be delayed in due to international shipping conditions which is depends on the countries receiveing. In case hard copy of catalog is not available then we will ship the soft copy.
- Refund: We can refund the order before shipping process was initiated. Incase Catalog not available, we will make sure to refund the order.
- Note: This is a Catalog Produt.
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