Laser Crystallization Instrument Related L...

Laser Crystallization Instrument Related L...

Laser Crystallization Instrument Related L... Made in Korea

Description

Features SLS, ELA, precision stage and varied special measuring instruments Hi-speed precision stage system satisfying precise transmission in serve micron degree and location precision for inspection instruments and semi-conductor integrated circuit manufacturing tools such as semi-conductor and display lithography instrument. Specifications High speed, precision stage & stable system frame design Stage speed: 500 mm/s Stage accuracy: 0.5 µm High power laser line beam optics Line beam size: 0.4 x 370mm Beam uniformity: <± 5%(top hat) Energy density: > 400 mJ/cm2 Various substrate size & automated substrate loader Substrate size: 370 x 470 mm(ELA-500) 590 x 670 mm(ELA-700) single arm, 1 port cassette User friendly line beam profiler and energy monitoring system Line beam profiler and energy monitoring system  

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