AURIGA®Information Beyond Resolution
CrossBeam® workstations . the ultimate combination of FIB and GEMINI® column
The AURIGA® is a highly flexible CrossBeam® workstation for custom tailored applications.
Unique Imaging
Imaging of non-conductive specimens using all standard detectors with local charge compensation
Simultaneous detection of topographical and compositional information with a unique detector scheme including EsB®-technology
Investigation of magnetic samples with GEMINI® objective lens design
Advanced Analytics
Analysis of non-conducting materials with local charge compensation
Optimum chamber geometry for the simultaneous integration of EDS, EBSD, STEM, WDS, SIMS etc.
Precise Processing
Innovative FIB technology with best-in-class resolution (< 2.5 nm)
High resolution live FE-SEM monitoring of the entire preparation process
Advanced gas processing technology for ion and e-beam assisted etching and deposition
Custom-Tailored and Future Assured
Based on a fully modular concept, the AURIGA® CrossBeam® workstation can be tailored to the individual customer's applications . today and in the future
Starting with a high-performance FE-SEM platform, the system can be upgraded with a wide variety of hardware and software options, such as FIB, GIS, local charge compensation system and different detectors.
AURIGA® and AURIGA® 60 Essential Specifications
MODEL
SEM
FIB
Resolution
GEMINI® column 1.0 nm at 15 kV1.9 nm at 1 kVValues measured at optimum working distance
Cobra column: < 2.5 nm at 30 kVCanion column: < 7 nm at 30 kV
Magnification
12x - 1000kx
300x-500kx
Probe Current
4 pA - 20 nA (100 nA optional )
1pA-50nA
Acceleration Voltage
0.1-30kV
<1.0-30kV
Emitter
Thermal field emission type
Ga Liquid metal ion source(LMIS)
Gas Injection System
a) Multi GIS for up to 5 precursors (Pt, C, W, insulator, fluorine, further gases on request)b) Multi GIS for up to 4 precursors with integrated local charge compensation system(use of all standard detectors possible)c) Single GIS system for 1 precursor (Pt, further gases on request)d) Fully automated and pneumatic retractable gas injector for local charge compensation and in-situ sample cleaning (use of all standard high vacuum detectors possible)
Detectors
In-lens: High efficiency annular type SE detectorChamber: Everhart-Thornley type SE detectorIn-lens: EsB® detector with filtering grid for BSE detection, filtering voltage 0 - 1500 VChamber: Combined Secondary Electron Secondary Ion (SESI) detector based on scintillator photomultiplier systemSolid state or scintillator type BSD detector GEMINI® multimode BF/DF STEM detector
Chamber
Multiple accessory ports for various options including STEM, 4QBSD, EBSD, EDS, WDS, SIMS, CL, GIS systems, cryo, local charge compensation and sample manipulation systems 2 x IR CCD-cameras included for sample viewing
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[EUCCK] Carl Zeiss Electron and Ion Beam M...
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