Vibration Isolation - Pneumatic Vibration ...

DVIM series Vibration Isolation Mount is highly damped version of our pneumatic isolator and ideal for OEM equipment with motorized X-Y stage or robots which require high performance vibration isolation and aggressive setting time for stage-induced motion of the isolated payload. G/T/M/F type can be selected on vibration isolation performance or feature/variety of equipment to be isolated. 1. Features- Specially designed isolators provide a high Vibration isolation performance both in vertical and horizontal direction. - Damping to be tuned by the outside variable orifice besides the internal orifice of the air chamber. - Mounting holes on the top and bottom plates for equipment assembly. - The optional oil damper units provide a high stiffness and A.O.V valves a rapid setting time, keeping the payload quiet for the high speed operated and heavy X-Y stage. 2. Applications- Ultimate Precision Equipment with X-Y stage. - Inspection and measuring machines for semicon/F.P.D industries. - Optical laser machines 3. General Specifications- Vibration Isolation: Pnumatic Isolation type - Natural Frequency: Vertical : 1.2~1.5Hz, Horizontal : 1.0~1.5hz - Roll-off Rate(10Hz): -30db - Damping: Air Damping by orifice(2 chambers) - Levelling: Auto Levelling by 3 level controllers - Levelling Accuracy: ±0.05~.1mm - Air Supply: 4~6kg/cm2 compressed Air