Description

Heated Angle Valve_WITH CONTROLLER

** Application
- Etcher
- CVD(Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System

** Features
- Extremely long life time
- Heating System
- Particle – Free
- Vibration _ Free
- Pneumatic Actuator
- Welded Bellows Seal
- Easy to service

** Options
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
- Heating Temperature
- Bellows Material

** Specifications

Pressure range		5 X 10-7mbar.l/s
Leak rate : body, seat		<1 X 10-9mbar.l/s
Differential pressure on the gate		≤ 1.2 bar in either direction
Material	Valve body, bonnet seal, blade	AL6061
	Welded bellows	SS316L (option Inconel)
	Valve actuator	AL6061, SS304
Seal Materials		CHEMRAZ(option Kalrez)
Temperature	Valve body	150°C (option 180’C)
	Valve actuator	100°C
Operation		Single acting
Cycle until first service		≥ 1 million
Position sensor (open/close) - Reed switch		SMC (D-A93)

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