Description

Butterfly Gate Valve

** Application
- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller

** Features
- Pneumatic actuator
- Bypass pumping line
- Particle and vibration free
- Easy maintenance

** Options
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)

Valve

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SIZE : ISO-100

Dimensions Approximate

** Specifications

Pressure range		1 X 10-6mbar.l/s
Leak rate : body, seat		<1 X 10-8mbar.l/s
Differential pressure on the gate		≤ 1.2 bar in either direction
Material	Valve body, bonnet seal, blade	AL6061
	Welded bellows	AL6061
	Valve actuator	SS304, AL6061
Seal Materials		VITON (option KALREZ, ETC)
Temperature	Valve body	120°C
	Valve actuator	80°C
Operation		Double acting
Cycle until first service		≥ 300.000
Position sensor (open/close) - Reed switch		Micro switch (SMC : D-A93

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