[Product Description]:
*Usage
- Delivers maximum high-frequence power from RF generator to the process chamber(load) and induces generation of plasma.
* Technical competitivencess
- Application of qualfied mass porductior technology
- mass porduction of over 1,000 units
- Satisfies on-site demand and Easy repairs
- Development of customized porduct.
Original technology for plama source Wide process application
- 400kHZ~100MHz Plasma Source
- 100W~50kW RF Power
Features:
- Excellent Performance
- Fast Matching Time
- Stable & Wide Matching Range
- High Power Delivery Effciency
[Product Features]
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