[Product Description]
*Usage
Delivers maximum high-frequence power from RF generator to the process chamber(load) and induces generation of plasma.
* Technical competitivencess
Application of qualfied mass porductior technology
-mass porduction of over 1,000 units
-Satisfies on-site demand and easy repairs
-Development of customized porduct.
Original technology for plama source
Wide process application
-400kHZ~100MHz Plasma Source
-100W~50kW RF Power
Excellent Performance
-Fast Matching Time
-Stable & Wide Matching Range
-High Power Delivery Effciency
[Product Features]
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