Optical coatingsHard coatingsMetal coatingsPolymer surface modificationsCoatings for flat panel display electoratesSpecial FeaturesIn-line sputter system with 8ea linear sputter guns for R&D and a small-scale production.Automatic process control through PLC interfacing.Carrier loading capability : 2x24" sheets/carrier.Standard tact time: depends on processing.Automatic jig moving system.Ion cleaning system with linear ion gun.Sheet capacity : 300 × 24" per day.Average throughput Up to 90,000 sheets per yearSpecificationsDimension : 10,464L x 2,244.5H x 1,363W(mm3)Power : Sputter Gun: DC Pulse 10kWIon Gun: 3kWGas : Ar, O2, N2Pump : Loading, Rotary(1,000L/min), TMP(800L/sec)Process, Rotary(1,000L/min), TMP(1,400L/sec)
In-line Sputter System for Large Area Depo...
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