Automatic Wet Station

Automatic Wet Station

Automatic Wet Station Made in Korea

Description

Features Application wafer size 4"& 12" wafer Wafer quantityof each batch 1 cassette or 2 cassettes Main body Antistatic Ivory PVC (SUS304 frame) Bath Materials PTFE or Quartz Loader/Unloader 1 cassettes ~ 8 cassettes stock High system reliability More than 97% up-rate Wafer transfer robot Front driving robot using Servo-motor Dryer Spin Dryer, IPA Dryer or Marangoni Dryer System control PLC control & WSMS(Wet Station Management System) Data interfaceprotocol Host communication with GEM/SECS II & HSMS Others Hot DIW unit, Chemicalyzer, O3 generator

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  • Payment: We accept payment through Paypal Only.
  • Shipping: We will ship the catalog once the payment is received. And you will be receiving the catalog with in 10 -14 busines days. Shipping might be delayed in due to international shipping conditions which is depends on the countries receiveing. In case hard copy of catalog is not available then we will ship the soft copy.
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