Features
Application wafer size
8"& 12" wafer
Wafer quantityof each batch
25 ~ 50 wafers(1 cassette or 2 cassettes)
Main body
Antistatic Ivory PVC (SUS304 frame)
Bath Materials
PTFE or Quartz
Loader/Unloader
4 cassettes ~ 8 cassettes stock
High system reliability
More than 97% up-rate
Wafer transfer robot
Front driving robot using Servo-motor
Dryer
Spin Dryer, IPA Dryer or Marangoni Dryer
System control
PLC control & WSMS(Wet Station Management System)Minimization of particle with Face to Face system
Data interfaceprotocol
Host communication with GEM/SECS II & HSMS
Others
Hot DIW unit, Chemicalyzer, O3 generator
Cassetteless Wet Station
Description
Product Inquiry
Purchase Product Catalog
Payment & Shipping Conditions:
- Payment: We accept payment through Paypal Only.
- Shipping: We will ship the catalog once the payment is received. And you will be receiving the catalog with in 10 -14 busines days. Shipping might be delayed in due to international shipping conditions which is depends on the countries receiveing. In case hard copy of catalog is not available then we will ship the soft copy.
- Refund: We can refund the order before shipping process was initiated. Incase Catalog not available, we will make sure to refund the order.
- Note: This is a Catalog Produt.
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