The Sputtering System
consists of a chamber made of SUS 304, mounted on a frame, pumping system, magnetron sputtering system substrate heating system, gas system, control system.
Chamber
has rectangular shape. it is made of 304 stainless steel Chamber has a door in front, substrate transport system, heating zone and sputterig zone(zones)
Pumping System
can be based on diffusion pump or on turbo-, or cryo-pumps in accordance with customer requirements.
Magnetron Sputter method
can be based on a single DC sputter, or dual pulsed sputter process (for oxide materials). target size can vary from 250 mm length up to 1600 mm length.
Gas Control System Substrate Heater
provides heating of a substrate prior to coating Heating element : sheathed heater
Control System Power Supply
in dependence of customer's requirements. can be DC, or RF, or pulsed (UNI of BIPOLAR).
Vacuum In-Line Sputtering System
Description
Product Inquiry
Purchase Product Catalog
Payment & Shipping Conditions:
- Payment: We accept payment through Paypal Only.
- Shipping: We will ship the catalog once the payment is received. And you will be receiving the catalog with in 10 -14 busines days. Shipping might be delayed in due to international shipping conditions which is depends on the countries receiveing. In case hard copy of catalog is not available then we will ship the soft copy.
- Refund: We can refund the order before shipping process was initiated. Incase Catalog not available, we will make sure to refund the order.
- Note: This is a Catalog Produt.
Share Vacuum In-Line Sputtering System in Social Media