The Sputtering System
consists of a chamber made of SUS 304, mounted on a frame, pumping system, magnetron sputtering system substrate heating system, gas system, control system.
Chamber
has rectangular shape. it is made of 304 stainless steel Chamber has a door in front, substrate transport system, heating zone and sputterig zone(zones)
Pumping System
can be based on diffusion pump or on turbo-, or cryo-pumps in accordance with customer requirements.
Magnetron Sputter method
can be based on a single DC sputter, or dual pulsed sputter process (for oxide materials). target size can...