Features:- Up to 8 sided TM for 6 process modules - 200mm (and smaller) cassettes with 26 slots- 2 Loadlocks with Vacuum Indexer - In-line Wafer aligner & Cooler available as options - Manual or Automatic door selectable - Wafer slide-out detection and mapping capacity- AGV interface is available as option.
cluster tool
Description
Product Inquiry
Purchase Product Catalog
Payment & Shipping Conditions:
- Payment: We accept payment through Paypal Only.
- Shipping: We will ship the catalog once the payment is received. And you will be receiving the catalog with in 10 -14 busines days. Shipping might be delayed in due to international shipping conditions which is depends on the countries receiveing. In case hard copy of catalog is not available then we will ship the soft copy.
- Refund: We can refund the order before shipping process was initiated. Incase Catalog not available, we will make sure to refund the order.
- Note: This is a Catalog Produt.
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