Machinery, Industrial Parts & Tools HomeProductsMachinery, Industrial Parts & Tools Inquiry Save to Favorites GO :::::Sort::::: Name Date Added Popular ↑ ↓ cluster tool Features:- Up to 8 sided TM for 6 process modules - 200mm (and smaller) cassettes with 26 slots- 2 Loadlocks with Vacuum Indexer - In-line Wafer aligner & Cooler available as options - Manual or Automatic door selectable - Wafer slide-out detection and mapping capacity- AGV interface is available as... Read More Inquiry Now Machinery, Industrial Parts & Tools Made in Korea Other Manufacturing & Processing Machinery Made in Korea cluster tool Made in Korea