Other Manufacturing & Processing Machinery HomeProductsOther Manufacturing & Processing Machinery Inquiry Save to Favorites GO :::::Sort::::: Name Date Added Popular ↑ ↓ Peald Advantages High deposition rate Wide choice of deposition sources Better physical properties Simple process sequence Scalable to 300 mm wafer process Applications Capping layer: Al2O3 Capacitor dielectric: Ta2O5 Ferroelectric material: SBT, PZT Electrode or barrier: Ti/TiN Atomic layer deposition (ALD) is promising technology to deposit very thin films required for semiconductor devices such as gate dielectric and diffusion barriers. Alternate supply of reactants allows completely conformal film growth and precise control of film thickness. Slow film growth is regarded... Read More Inquiry Now Machinery, Industrial Parts & Tools Made in Korea Other Manufacturing & Processing Machinery Made in Korea peald Made in Korea UNPLA CMP Genitech's CMP technology is licensed to Semicontech Corporation. The patterns on ever shrinking semiconductor chips are now as fine as 0.18 micrometer and will go finer. Completely flat surfaces are needed to form such find patterns by lithography. Chemical mechanical planarization (CMP) is used to prepare flat surfaces on wafer. Genitech's unique mechanism, for which patents are pending, provides ideal motion of a polishing pad relative to a wafer. To every point of wafer surface, the pad appears to move in the same way with the same velocity in every direction. Also the displacement of... Read More Inquiry Now Machinery, Industrial Parts & Tools Made in Korea Other Manufacturing & Processing Machinery Made in Korea unpla cmp Made in Korea Superfill CVD Metallization for current and beyond 100nm Copper is the way for interconnection and there is a dry way for copper deposition. Superfill CVD can fill holes and trenches swiftly without voids or defects, of which flat top surface and thin film on field area makes CMP easy. Figure 1. SEM images show the evolution of Cu film deposited on a trench by Superfill CVD. Figure 2. SEM image shows flat top surface after Superfill CVD of Cu on repeating hole pattern. Figure 3. Crosssectional SEM image of a hole half-filled by Superfill... Read More Inquiry Now Machinery, Industrial Parts & Tools Made in Korea Other Manufacturing & Processing Machinery Made in Korea superfill cvd Made in Korea