Vacuum Pumping System Oil Rotary Pump : E1M175Mechanical Booster Pump : EH500High Vacuum Pump:Oil Diffusion Pump12000L/sec (Option: Cryo-pumps or Turbo Molecular Pumps)Vacuum Valves SystemType: 4”, 22”Chamber Heating SystemMax Temperature: o to 400?Type: Halogen Lamp(Option: Micro-sheathe Heater)Substrate Holder Type:Dome or planetaryRotation Speed:0 to 30rpmsoft start, soft stop and speed can be changed Electronic control system:Type: Panel PCmodify and change any desired controlfull control the coater to meet and perform the ultimatedesired final productstechnical information is...