Applications
Hydrogenated amorphous silicon (a-SiH), silicon-nitride (SiNx) Silicon oxide (SiO2) n+ a-SiH, p+ a-SiH, SiNxOy, amorphous carbon, etc.
Features
Sample size 150 x 50 mm 2 or 8 inch Loading and unloading Robot controlled Maximum suscepter temperature =450 °C RF generator 13.56 MHz (600 W)
Performance
Good thickness uniformity 5% High-quality thin-films...