EVO® HDHigh Performance, Total Flexibility
The EVO® HD is the latest innovation in scanning electron microscopy from Carl Zeiss. Delivering a groundbreaking increase in resolution over conventional scanning electron microscopes (SEM), the EVO® HD introduces High Definition to electronmicroscopy.
The EVO® HD features a new electron source technology facilitating unmatched low-kV resolution. This makes the EVO® HD the premier choice for challenging specimens, the imaging of surface detail or for beam-sensitive materials.
The resolution improvements at higher probe currents provide enhanced analytical accuracy.This technology demonstrates unchallenged performance in the conventional SEM (C-SEM) arena and as a result, the EVO® HD dramatically improves on the imaging resolution currently achievable in C-SEM.
With this step-change in resolution, the EVO® HD now advances knowledge in those applications that were previously limited in conventional SEMs.
Essential Specifications
EVO® HD15
EVO® HD25
Resolution
1.9 nm at 30 kV - SE3 nm at 30 kV - SE (VP mode)10 nm at 30 kV - 1nA5 nm at 3 kV - SE8 nm at 1 kV - SE
Acceleration Voltage
0.2-30kV
Magnification
<5-1,000,000x
Field of View
6 mm at Analytical Working Distance (AWD)
X-ray Analysis
8.5 mm AWD and 35° take-off angle
OptiBeam®(1) Modes
Resolution(2), Depth(2), Analysis(2), Field, Fisheye
Pressure Range
10 - 400 Pa(3) (MA configuration)10 - 3000 Pa (LS configuration)
Available Detectors
BSD - Multisegment DiodeETSE - Everhart-Thornley Secondary Electron DetectorVPSE - Variable Pressure Secondary Electron DetectorEPSE - Extended Pressure Secondary Electron DetectorSCD - Specimen Current DetectorSTEM - Transmission Imaging DetectorCL - Cathodoluminescence Detector
Chamber
365 mm (Ø) x 275 mm (h)
420 mm (Ø) x 330 mm (h)
5-Axes Motorized Specimen Stage
X = 125 mm, Y = 125 mm, Z = 50 mmT = -10° to 90°, R = 360° (continuous)Stage control by mouse or optionaljoystick and control panel
X = 130 mm, Y = 130 mm, Z = 50 mmT = -10° to 90°, R = 360° (continuous)Stage control by mouse or optionaljoystick and control panel
Maximum Specimen Height
145mm
210mm
Future Assured Upgraded Paths
BeamSleeve®, Extended Pressure, Water vapour VP gas
Image Framestore
3072 x 2304 pixel, signal acquisition by integration and averaging
System Control
SmartSEM®(4) GUI operated by mouse and keyboardWindows® XP multilingual operating system
Utility Requirements
100-240V, 50 or 60 Hz single phase, no water cooling requirement
(1) Optibeam®, active column control for best resolution, best depth of field or best field of view(2) available in HV and VP (up to 133 Pa)(3) with optional TTL upgrade(4) SmartSEM®, Fifth generation SEM control Graphical User Interface
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[EUCCK] Carl Zeiss Electron and Ion Beam M...
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