[EUCCK] Carl Zeiss Electron and Ion Beam M...

MERLINAnalytical Power for the Sub-nanometer World As the flagship of the FE-SEM portfolio, the MERLIN® is a two-in-one system: it both meets even the highest demands on a high resolution imaging microscope and is also an optimized system for performing ultrafast analytical investigations with maximum beam current capabilities. On this basis, the MERLIN® is an optimized, combined tool for both the imaging and analytical markets, featuring the following benefits: Nano Analytics High resolution & high current: The GEMINI® II column enables high resolution even at high probe current Optimized for fastest EDX, WDX , EBSD & CL signal acquisition Best-in-class material contrast with unique EsB® detector Total Information Parallel information acquisition of compositional contrast, topographical & crystalline information through complete detection system (CDS) High resolution imaging of non-conductive materials through charge compensation Optimized image quality as a result of in-situ sample cleaning during imaging In-situ 3 dimensional surface modelling Ease of Use Fastest Sub nm image acquisition including sample transfer in less than 60 seconds Professional results by novice user due to fully automated instrument adjustment No time consuming sample preparation of non-conductive samples due to unique charge compensation Future Assured Upgradeable building blocks for decades of first class system performance Fastest, forward-design SEM electronics ready for future technology integration Upgradeable detection possibilities by plug & play solutions for years of leading edge technology integration MERLIN® Essential Specifications Resolution (optimal WD)All resolution specificationsare dependent on thesystem configuration. 0.8 nm at 15 kV1.4 nm at 1 kV3.0 nm at 20 kV at 10 nA,WD = 8,5mm0.6 nm at 30 kV (STEM mode) Acceleration Voltage 0.01-30kV Probe Current 10pA up to 300 nA (depending on system configuration) Magnification 12 . 2,000,000 x in SE mode100 . 2,000,000 x with EsB® detector Electron Emitter Thermal field emission type, stability>0,2 % / h Detectors High efficiency in-lens SE detectorEverhart Thornley Secondary Electron detectorEsB® detector with filtering grid, filtering voltage 0 . 1500 VIntegrated AsB® detector Specimen Stage 5-Axes Motorised Eucentric Specimen StageX = 130mmY = 130mmZ = 50mmT = - 3° to 70°R = 360º (continous)Further additional optional stage systems available Chamber 330 mm (Ø) x 270 mm (h)15 accessory ports for various options including STEM, 4QBSD, EBSD, EDS, WDS CCD-Camera with IR-illuminationCharge compensation with in-situ cleaning Image Processing Resolution: Up to 6144 x 4608 pixel (32 k x 32 k pixel optional available)A large number of integration and averaging modes available Image Display Single 19" TFT monitor with SEM image displayed at 1024 x 768 pixel System Control SmartSEM® with Windows®XP, operated by mouse, keyboard, joystick, control panel More information>> e-Book