The SIGMATM featuring GEMINI® technology, provides outstanding imaging and analytical results from a field emission scanning electron microscope with the capability to handle all material types. GEMINI® is established as the market leading field emission column design offering unrivaled ease of use, superb low voltage imaging and ultra stable probe currents for analytical applications.
The SIGMATM can handle specimen of up to 250mm diameter and 145mm tall. Furthermore, the coplanar chamber design provides the ideal geometry for simultaneous EDS and electron backscattered diffraction (EBSD). Materials analysis at high resolution is provided by the class leading X-ray geometry for both energy (EDS) and wavelength dispersive spectroscopy (WDS).
The SIGMATM is available with variable pressure (VP) technology for exceptional imaging and analysis of non-conductive specimen. It is compatible with a wealth of accessories including the class leading BSD and VPSE G3 detectors for superior materials contrast and SE imaging in VP.
The SIGMATM provides comprehensive imaging solutions for demanding applications in semiconductor, materials analysis, pharmaceutical and life science applications.
Analytical platform to suit every application
Best-in-class imaging with GEMINI® Technology
Unparalleled ease of use
FE-SEM providing unrivaled versatility
Essential Specifications
EVO® HD15
Resolution
1.3 nm at 20 kV1.5 nm at 15 kV2.8 nm at 1 kV2.5 nm at 30 kV (in VP mode)
Acceleration Voltage
0.1-30kV
Probe Current
4pA - 20nA (40nA optional for SIGMATM HV)
Magnification
12x - 1,000,000x
Electron Emitter
Thermal field emission type
Standard Detectors
In-lens SE detector, ETSE detector, VPSE detector (in VP mode)
Image Processing
7 integration and averaging modes
System Control
Windows® XP based SmartSEM®
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[EUCCK] Carl Zeiss Electron and Ion Beam M...
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