Genral Properies
ITEM
Original ESC
Conversion ESC
Dielectric Material
Polyimide
Aluminum Nitride
Dielectric Thickness
25 ~ 125 ?
300 ~ 500 ?
Pin-hole Issue
Weak
Strong
He Leak Error
Weak
Strong
Life time
Normal
Longer Life time
Hardware Change
N/A
N/A
Better Thermal Uniformity & Longer Life Time
Applications
Electro-Static Chuck
Description
Product Inquiry
Purchase Product Catalog
Payment & Shipping Conditions:
- Payment: We accept payment through Paypal Only.
- Shipping: We will ship the catalog once the payment is received. And you will be receiving the catalog with in 10 -14 busines days. Shipping might be delayed in due to international shipping conditions which is depends on the countries receiveing. In case hard copy of catalog is not available then we will ship the soft copy.
- Refund: We can refund the order before shipping process was initiated. Incase Catalog not available, we will make sure to refund the order.
- Note: This is a Catalog Produt.
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