Genral Properies
ITEM
Original ESC
Conversion ESC
Dielectric Material
Polyimide
Aluminum Nitride
Dielectric Thickness
25 ~ 125 ?
300 ~ 500 ?
Pin-hole Issue
Weak
Strong
He Leak Error
Weak
Strong
Life time
Normal
Longer Life time
Hardware Change
N/A
N/A
Better Thermal Uniformity & Longer Life...