Genral Properies
ITEM
ITEM
Al2O3
HiCera
Density
g/ ?
3.8 ~ 3.9
3.2 ~ 3.3
Vickers Hardness
GPa
16 ~ 18.5
10.46
Thermal Conductivity
W / mK
14 ~ 16
80 ~ 180
CTE
1E-6 /?
6.0 ~ 6.5
3.9 ~ 4.2
Dielectric Constant
1 MHz
9.2 ~ 10.2
8.6 ~ 9.2
Volume Resistivity
?-cm
1E10 ~ 16
1E11 ~ 16
Dielectric Strength
V / ?
14 ~ 15
14 ~ 15
Max 10% Yield-up & 80% Defect Reduction
Resistance agint Radical Attack
Material
Resistance to F
Resistance to CI
Resistance to O...