Remote Plasma Control Valve
** Application
- High vacuum process
- All CVD process (including MO, PE,HDP, LP and AP)
- Photovoltaic and semiconductor application
** Features
- Pneumatic actuation
- Rated for 1 million cycles
- Double o-ring seal
- Easy maintenance
** Options
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
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