Products

  • ESC(Electrostatic Chuck)

    ESC(Electrostatic Chuck) <img src="http://www.bestmadeinkorea.com/photo/2015/jc/ESC-1.jpg" alt="ESC-1.jpg"...

  • RPS

    RPS Plasma is an ionized gas essential in many process of semiconductor such as photo-resist removal, wafer pre-clean and thin film nitridation and oxidation. Ak Tech provides repairing service of RF powered remote sources for generation of oxygen, nitrogen, hydrogen plasma <img src="http://www.bestmadeinkorea.com/photo/2015/jc/RPS-1.jpg" alt="RPS-1.jpg" > SERIES AX7650 AX7650 AX7650 AX7650 Max Flow Rate 2L(0.1~2sim NF3) 2L(0.1~2sim NF3) 2L(0.1~2sim NF3) 2L(0.1~2sim NF3) Max...

  • Magnetic Seal

    Magnetic Seal A magnetic fluid (or ferrofluid) is a liquid which becomes strongly magnetized in the presence of a magnetic field. Magnetic fluids are colloidal liquids made of nanoscale ferromagnetic, particles suspended In a carrier fluid-usually an organic solvent or water. Ak Tech provides services of not only manufacturing but repairing of magnetic fluid applied products for the Semiconductor industry. <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Magnetic-Seal-1.jpg" alt="Magnetic-Seal-1.jpg" > <img...

  • Metal Heater

    Metal Heater AK Tech provides services of not only manufacturing but repairing of cast in aluminium heater and metal heater for the semiconductor industry. <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Metal-Heater-01.jpg" alt="Metal-Heater-01.jpg" > <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Metal-Heater-02.jpg" alt="Metal-Heater-02.jpg" > <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Metal-Heater-03.jpg" alt="Metal-Heater-03.jpg" > <img...

  • Rendulum Gate Valve

    Rendulum Gate Valve <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Rendulum-Gate-Valve-01.jpg" alt="Rendulum-Gate-Valve-01.jpg" >   ** Application - Sputter Deposition - Plasma Etch - CVD - Other application that require pressure controller ** Features - Compact - Low vibration operation - Easy and fast maintenance - Pneumatic actuator - Actuator Up/Down install possibility ** Options -...

  • Butterfly Gate Valve

    Butterfly Gate Valve <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Butterfly-Gate-Valve-01.jpg" alt="Butterfly-Gate-Valve-01.jpg" >   ** Application - Sputter Deposition - Plasma Etch - CVD - Other application that require pressure controller ** Features - Pneumatic actuator - Bypass pumping line - Particle and vibration free - Easy maintenance ** Options - Various o-ring compounds...

  • Butterfly Gate Valve

    Butterfly Gate Valve <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Butterfly-Gate-Valve-01.jpg" alt="Butterfly-Gate-Valve-01.jpg" >   ** Application - Sputter Deposition - Plasma Etch - CVD - Other application that require pressure controller ** Features - Pneumatic actuator - Bypass pumping line - Particle and vibration free - Easy maintenance ** Options - Various o-ring compounds...

  • Butterfly Gate Valve

    Butterfly Gate Valve <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Butterfly-Gate-Valve-01.jpg" alt="Butterfly-Gate-Valve-01.jpg" >   ** Application - Sputter Deposition - Plasma Etch - CVD - Other application that require pressure controller ** Features - Pneumatic actuator - Bypass pumping line - Particle and vibration free - Easy maintenance ** Options - Various o-ring compounds...

  • 2Stage Angle Valve

    2Stage Angle Valve <img src="http://www.bestmadeinkorea.com/photo/2015/jc/2Stage-Angle-Valve-01.jpg" alt="2Stage-Angle-Valve-01.jpg" >   ** Application - Etcher - CVD(Mo, LP, HDP, PE) - Sputter - R.T.P - LCD, PDP Systems - Other Vacuum System ** Features - 2Step(soft & fast) pumping - Particle – Free - Vibration – Free - Pneumatic Actuator - Fast valve welded bellows (AM350) - Easy to...

  • Heated Angle Valve_WITH CONTROLLER

    Heated Angle Valve_WITH CONTROLLER <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Remote-Plasma-Control-Valve-02.gif" alt="Remote-Plasma-Control-Valve-02.gif" > ** Application - Etcher - CVD(Mo, LP, HDP, PE) - Sputter - R.T.P - LCD, PDP Systems - Other Vacuum System ** Features - Extremely long life time - Heating System - Particle – Free - Vibration _ Free - Pneumatic Actuator - Welded Bellows Seal - Easy to service ** Options - Various o-ring...

  • Remote Plasma Control Valve

    Remote Plasma Control Valve ** Application - High vacuum process - All CVD process (including MO, PE,HDP, LP and AP) - Photovoltaic and semiconductor application ** Features - Pneumatic actuation - Rated for 1 million cycles - Double o-ring seal - Easy maintenance ** Options - Various o-ring compounds (Kalrez®,Chemraz®, etc.) <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Remote-Plasma-Control-Valve-01.jpg" alt="" > <img...

  • Manual Gate Valve

    Manual Gate Valve ** Application - Etcher - CVD(Mo, LP, HDP, PE) - Sputter - R.T.P - LCD, PDP Systems - Other Vacuum System ** Features - Manual Operation - Particle – Free - Vibration – Free - Shaft & Welded bellows Seal (AM350) - Easy to service - Operation Lock Button ** Options - Various o-ring compounds (Kalrez®,Chemraz®, etc.) - Bellows Material (SS316L , Inconel ) <img...

  • Pneumatic Gate Valve

    Pneumatic Gate Valve   ** Application - Etcher - CVD(Mo, LP, HDP, PE) - Sputter - R.T.P - LCD, PDP Systems - Other Vacuum System ** Features - Particle – Free - Vibration – Free - Pneumatic Actuator - Position Indicator - Fast valve welded bellows (AM350) - Easy to service ** Options - Various o-ring compounds (Kalrez®,Chemraz®, etc.) - Bellows Material (SS316L , Inconel...

  • Auto Gate Valve-WITH CONTROLLER

    Auto Gate Valve-WITH CONTROLLER <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Auto-Gate-Valve-WITH-CONTROLLER-01.jpg" alt="Auto-Gate-Valve-WITH-CONTROLLER-01.jpg" >   ** Application - Etcher - CVD(Mo, LP, HDP, PE) - Sputter - R.T.P - LCD, PDP Systems - Other Vacuum System ** Features - 2Step(soft & fast) pumping - Particle – Free - Vibration – Free - Pneumatic Actuator - Fast valve welded...

  • Protection Gate Valve

    Protection Gate Valve ** Application - Etch, CVD (MO, PE, HDP, LP)Implant, Sputtering - Nanotechnology process with high particulate levels - Thin film photovoltaic panels ** Features - Protects process environment from back-streaming powder in the event of dry pump failure - Reduces expensive down time in powder producing process Fast pneumatic actuation-closes in <0.5 seconds(Normal 0.7seconds) - Long cycle life under adverse process conditions ** Options - Available with either ISO 100-K or ISO 160-K flanges - 1,...

  • Rectangular Gate Valve

    Rectangular Gate Valve <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Rectangular-Gate-Valve-1.jpg" alt="Rectangular-Gate-Valve-1.jpg" > <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Rectangular-Gate-Valve-2.jpg" alt="Rectangular-Gate-Valve-2.jpg" > <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Rectangular-Gate-Valve-3.jpg" alt="Rectangular-Gate-Valve-3.jpg" > <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Rectangular-Gate-Valve-4.jpg"...

  • Metal bellows

    Metal bellows Metal bellows are elastic vessels that can be compressed when pressure is applied to the vessel, or extended under vacuum. when the pressure or vacuum is released, the bellows will return to its original shape. Especially welded bellows are manufactured by welding a number of individually formed diaphragms to each other.Our specialized technique and long experience allows to provide high quality product that the semiconductor industry requires and needs. <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Metal-bellows-1.jpg"...