ESC(Electrostatic Chuck)

ESC(Electrostatic Chuck) <img src="http://www.bestmadeinkorea.com/photo/2015/jc/ESC-1.jpg" alt="ESC-1.jpg"...

• Engine Parts Made in Korea
• ESC(Electrostatic Chuck) Made in Korea

RPS

RPS Plasma is an ionized gas essential in many process of semiconductor such as photo-resist removal, wafer pre-clean and thin film nitridation and oxidation. Ak Tech provides repairing service of RF powered remote sources for generation of oxygen, nitrogen, hydrogen plasma <img src="http://www.bestmadeinkorea.com/photo/2015/jc/RPS-1.jpg" alt="RPS-1.jpg" > SERIES AX7650 AX7650 AX7650 AX7650 Max Flow Rate 2L(0.1~2sim NF3) 2L(0.1~2sim NF3) 2L(0.1~2sim NF3) 2L(0.1~2sim NF3) Max...

• Engine Parts Made in Korea
• RPS Made in Korea

Rendulum Gate Valve

Rendulum Gate Valve <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Rendulum-Gate-Valve-01.jpg" alt="Rendulum-Gate-Valve-01.jpg" >   ** Application - Sputter Deposition - Plasma Etch - CVD - Other application that require pressure controller ** Features - Compact - Low vibration operation - Easy and fast maintenance - Pneumatic actuator - Actuator Up/Down install possibility ** Options -...

• Engine Parts Made in Korea
• Rendulum Gate Valve Made in Korea

Butterfly Gate Valve

Butterfly Gate Valve <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Butterfly-Gate-Valve-01.jpg" alt="Butterfly-Gate-Valve-01.jpg" >   ** Application - Sputter Deposition - Plasma Etch - CVD - Other application that require pressure controller ** Features - Pneumatic actuator - Bypass pumping line - Particle and vibration free - Easy maintenance ** Options - Various o-ring compounds...

• Engine Parts Made in Korea
• Butterfly Gate Valve Made in Korea

Butterfly Gate Valve

Butterfly Gate Valve <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Butterfly-Gate-Valve-01.jpg" alt="Butterfly-Gate-Valve-01.jpg" >   ** Application - Sputter Deposition - Plasma Etch - CVD - Other application that require pressure controller ** Features - Pneumatic actuator - Bypass pumping line - Particle and vibration free - Easy maintenance ** Options - Various o-ring compounds...

• Engine Parts Made in Korea
• Butterfly Gate Valve Made in Korea

Butterfly Gate Valve

Butterfly Gate Valve <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Butterfly-Gate-Valve-01.jpg" alt="Butterfly-Gate-Valve-01.jpg" >   ** Application - Sputter Deposition - Plasma Etch - CVD - Other application that require pressure controller ** Features - Pneumatic actuator - Bypass pumping line - Particle and vibration free - Easy maintenance ** Options - Various o-ring compounds...

• Engine Parts Made in Korea
• Butterfly Gate Valve Made in Korea

2Stage Angle Valve

2Stage Angle Valve <img src="http://www.bestmadeinkorea.com/photo/2015/jc/2Stage-Angle-Valve-01.jpg" alt="2Stage-Angle-Valve-01.jpg" >   ** Application - Etcher - CVD(Mo, LP, HDP, PE) - Sputter - R.T.P - LCD, PDP Systems - Other Vacuum System ** Features - 2Step(soft & fast) pumping - Particle – Free - Vibration – Free - Pneumatic Actuator - Fast valve welded bellows (AM350) - Easy to...

• Engine Parts Made in Korea
• 2Stage Angle Valve Made in Korea

Heated Angle Valve_WITH CONTROLLER

Heated Angle Valve_WITH CONTROLLER <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Remote-Plasma-Control-Valve-02.gif" alt="Remote-Plasma-Control-Valve-02.gif" > ** Application - Etcher - CVD(Mo, LP, HDP, PE) - Sputter - R.T.P - LCD, PDP Systems - Other Vacuum System ** Features - Extremely long life time - Heating System - Particle – Free - Vibration _ Free - Pneumatic Actuator - Welded Bellows Seal - Easy to service ** Options - Various o-ring...

• Engine Parts Made in Korea
• Heated Angle Valve_WITH CONTROLLER Made in Korea

Manual Gate Valve

Manual Gate Valve ** Application - Etcher - CVD(Mo, LP, HDP, PE) - Sputter - R.T.P - LCD, PDP Systems - Other Vacuum System ** Features - Manual Operation - Particle – Free - Vibration – Free - Shaft & Welded bellows Seal (AM350) - Easy to service - Operation Lock Button ** Options - Various o-ring compounds (Kalrez®,Chemraz®, etc.) - Bellows Material (SS316L , Inconel ) <img...

• Engine Parts Made in Korea
• Manual Gate Valve Made in Korea

Pneumatic Gate Valve

Pneumatic Gate Valve   ** Application - Etcher - CVD(Mo, LP, HDP, PE) - Sputter - R.T.P - LCD, PDP Systems - Other Vacuum System ** Features - Particle – Free - Vibration – Free - Pneumatic Actuator - Position Indicator - Fast valve welded bellows (AM350) - Easy to service ** Options - Various o-ring compounds (Kalrez®,Chemraz®, etc.) - Bellows Material (SS316L , Inconel...

• Engine Parts Made in Korea
• Pneumatic Gate Valve Made in Korea

Auto Gate Valve-WITH CONTROLLER

Auto Gate Valve-WITH CONTROLLER <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Auto-Gate-Valve-WITH-CONTROLLER-01.jpg" alt="Auto-Gate-Valve-WITH-CONTROLLER-01.jpg" >   ** Application - Etcher - CVD(Mo, LP, HDP, PE) - Sputter - R.T.P - LCD, PDP Systems - Other Vacuum System ** Features - 2Step(soft & fast) pumping - Particle – Free - Vibration – Free - Pneumatic Actuator - Fast valve welded...

• Engine Parts Made in Korea
• Auto Gate Valve-WITH CONTROLLER Made in Korea

Protection Gate Valve

Protection Gate Valve ** Application - Etch, CVD (MO, PE, HDP, LP)Implant, Sputtering - Nanotechnology process with high particulate levels - Thin film photovoltaic panels ** Features - Protects process environment from back-streaming powder in the event of dry pump failure - Reduces expensive down time in powder producing process Fast pneumatic actuation-closes in <0.5 seconds(Normal 0.7seconds) - Long cycle life under adverse process conditions ** Options - Available with either ISO 100-K or ISO 160-K flanges - 1,...

• Engine Parts Made in Korea
• Protection Gate Valve Made in Korea

Rectangular Gate Valve

Rectangular Gate Valve <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Rectangular-Gate-Valve-1.jpg" alt="Rectangular-Gate-Valve-1.jpg" > <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Rectangular-Gate-Valve-2.jpg" alt="Rectangular-Gate-Valve-2.jpg" > <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Rectangular-Gate-Valve-3.jpg" alt="Rectangular-Gate-Valve-3.jpg" > <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Rectangular-Gate-Valve-4.jpg"...

• Engine Parts Made in Korea
• Rectangular Gate Valve Made in Korea

Metal bellows

Metal bellows Metal bellows are elastic vessels that can be compressed when pressure is applied to the vessel, or extended under vacuum. when the pressure or vacuum is released, the bellows will return to its original shape. Especially welded bellows are manufactured by welding a number of individually formed diaphragms to each other.Our specialized technique and long experience allows to provide high quality product that the semiconductor industry requires and needs. <img src="http://www.bestmadeinkorea.com/photo/2015/jc/Metal-bellows-1.jpg"...

• Engine Parts Made in Korea
• Metal bellows Made in Korea