TITAN Series
¦Outline¦
Roll-to-Roll sputter system for Multi layer
Multi layer coating for Capacitive type ITO touch film of Touch screen panel
Multi layer coating for mixed Metal and Oxide materials
Metal and Oxide application with High speed
¦Features¦
Plasma treatment type : AC/DC Bombardment, Linear ion source
Chamber : Single chamber (separated winder, pre-treatment, sputter zone, buffer zone)
Cathode type : Single planar magnetron cathode, Dual planar magnetron cathode, Single rotary cathode, Dual rotary cathode
Source power : DC, Pulse DC, AC power supply...