Machinery, Industrial Parts & Tools HomeProductsMachinery, Industrial Parts & Tools Inquiry Save to Favorites GO :::::Sort::::: Name Date Added Popular ↑ ↓ 300mm Dry Cleaning System (ZIVIS II) ZIVIS II is a high volume production Plasma Oxide Cleaning (POC) system for processing 300mm wafers. A dry cleaning solution is implemented to overcome the disadvantages of using the wet cleaning process, in which dry cleaning is becoming more critical in areas where semiconductor manufacturing technology is becoming more complex and minute. Zivis II is designed to meet the semiconductor industry standards for cleaning processes. It has delivered more consistent results while maintaining the safety threshold for particles when compared to batch type systems. The new POC system also has a... Read More Inquiry Now Machinery, Industrial Parts & Tools Made in Korea Other Manufacturing & Processing Machinery Made in Korea Dry Cleaning System Made in Korea ZIVIS II Made in Korea 300mm Ashing System (TERA 21) Introduced in 1999 and designed for FEOL photoresist strip providing high productivity and low CoO/CoC performances. Featuring modular design of mainframe, it is consisted of standard two process chambers and max. three process chambers can be configured with. Each chamber processes two wafers at a time with high throughput. TERA21 system uses two different robotic systems in order to transfer the wafers from FOUP to process chambers. The MASIC (Multi Axis Synchronized Interpolation Control) Robot in EFEM module and advanced four paddle robot in transfer module that provides ultimate... Read More Inquiry Now Machinery, Industrial Parts & Tools Made in Korea Other Manufacturing & Processing Machinery Made in Korea Ashing System Made in Korea wafer fabrication systems Made in Korea photoresist strip providing Made in Korea lite etching system Made in Korea etching Made in Korea 200mm Ashing System (DAS2000) Introduced in 1997 and designed for photoresist strip providing high productivity and low CoO/CoC performances. Featuring modular design of mainframe and two single type process chambers configured with downstream microwave plasma module on top of each process chamber. DAS2000 system provides a compact system design with high repeatability and residue free process using microwave plasma source. DAS2000 system integrates the production proven technologies to offer high throughput implant strip and post etch clean process solution. The downstream microwave source delivers the... Read More Inquiry Now Machinery, Industrial Parts & Tools Made in Korea Other Manufacturing & Processing Machinery Made in Korea wafer fabrication systems Made in Korea photoresist strip providing Made in Korea ashing system Made in Korea lite etching system Made in Korea etching Made in Korea 300mm Pattern Profiling System (Profiler) Profiler is a new generation Multi-Application system that performs Pattern Profiling and Plasma Oxide Dry Cleaning (POC) utilizing a Point Inductively Coupled Plasma (PICP) source for semiconductor manufacturing under the <3Xnm design processes. It supports a wide process window utilizing chuck & baffle temperature controls, high & low Etch Rates (50~600/min), and good wafer Uniformity (<3.0%) Performance, low particle control, and outstanding reliability make the profier a highly attractive and effective low-cost solution for various application purpose.... Read More Inquiry Now Machinery, Industrial Parts & Tools Made in Korea Other Manufacturing & Processing Machinery Made in Korea Pattern Profiling System Made in Korea Profiler Made in Korea Lite Etching System (TSL3000) Profiler is a new generation Multi-Application system that performs Pattern Profiling and Plasma Oxide Dry Cleaning (POC) utilizing a Point Inductively Coupled Plasma (PICP) source for semiconductor manufacturing under the <3Xnm design processes. It supports a wide process window utilizing chuck & baffle temperature controls, high & low Etch Rates (50~600/min), and good wafer Uniformity (<3.0%) Performance, low particle control, and outstanding reliability make the profier a highly attractive and effective low-cost solution for various application purpose.... Read More Inquiry Now Machinery, Industrial Parts & Tools Made in Korea Other Manufacturing & Processing Machinery Made in Korea Lite Etching System Made in Korea TSL3000 Made in Korea