Application
Diffusion / Oxidation(Wet/Dry) / Annealing / Alloy / LPCVD
Features
Full Batch 12" Vertical Furnace
16 FOUP stock
Load Lock Function
2 FIMS (Improve Through-Put)
Boat Rotation
FAB Automation (OHT)
Flexibility for S/W upgrade
Specification
Parameters
Unit
Specifications
Wafer Size
mm
300
Temperature Range
°C
150 ~ 1200
Constant Temp Zone
mm
> 900
Temp Uniformity
°C
< ± 0.5
Wafer Pitch
mm
7.5 [5.5~9]
Batch Size
#of wfs
100
Throughput [4hr Process]
#of wfs/mo
18,000
Temp Control
#of zones
4 ~ 5
Temp Control Mode
T/C
Spike, Profile, Cascade
Full Batch Type Vertical Furnace
Description
Product Inquiry
Purchase Product Catalog
Payment & Shipping Conditions:
- Payment: We accept payment through Paypal Only.
- Shipping: We will ship the catalog once the payment is received. And you will be receiving the catalog with in 10 -14 busines days. Shipping might be delayed in due to international shipping conditions which is depends on the countries receiveing. In case hard copy of catalog is not available then we will ship the soft copy.
- Refund: We can refund the order before shipping process was initiated. Incase Catalog not available, we will make sure to refund the order.
- Note: This is a Catalog Produt.
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