Machinery, Industrial Parts & Tools HomeProductsMachinery, Industrial Parts & Tools Inquiry Save to Favorites GO :::::Sort::::: Name Date Added Popular ↑ ↓ Mini Batch Vertical Furnace Application Diffusion / Oxidation(Wet/Dry) / Annealing / Alloy / LPCVD Features Mini Batch Type Vertical Furnace Vertical Furnace for 100~300mm wafers 2 I/O Port Boat Rotation Available PFlexibility for S/W upgrade Specification Parameters Unit Specifications Wafer size mm 150 ~ 300 Maximum Temp Zone °C 1200 Constant Temp Zone mm > 500 Temp Uniformity °C < ±0.5 Wafer Pitch mm 6.35 [5.2~9] Batch Size #of wfs 50[max 75] Throughput [4hr Process] #of wfs/mo... Read More Inquiry Now Machinery, Industrial Parts & Tools Made in Korea Other Manufacturing & Processing Machinery Made in Korea Mini Batch Vertical Furnace Made in Korea Full Batch Type Vertical Furnace Application Diffusion / Oxidation(Wet/Dry) / Annealing / Alloy / LPCVD Features Full Batch 12" Vertical Furnace 16 FOUP stock Load Lock Function 2 FIMS (Improve Through-Put) Boat Rotation FAB Automation (OHT) Flexibility for S/W upgrade Specification Parameters Unit Specifications Wafer Size mm 300 Temperature Range °C 150 ~ 1200 Constant Temp Zone mm > 900 Temp Uniformity °C < ± 0.5 Wafer Pitch mm 7.5 [5.5~9] Batch Size #of wfs 100 Throughput [4hr Process] #of... Read More Inquiry Now Machinery, Industrial Parts & Tools Made in Korea Other Manufacturing & Processing Machinery Made in Korea Full Batch Made in Korea Vertical Furnace Made in Korea