Application
Diffusion / Oxidation(Wet/Dry) / Annealing / Alloy / LPCVD
Features
Mini Batch Type Vertical Furnace
Vertical Furnace for 100~300mm wafers
2 I/O Port
Boat Rotation Available
PFlexibility for S/W upgrade
Specification
Parameters
Unit
Specifications
Wafer size
mm
150 ~ 300
Maximum Temp Zone
°C
1200
Constant Temp Zone
mm
> 500
Temp Uniformity
°C
< ±0.5
Wafer Pitch
mm
6.35 [5.2~9]
Batch Size
#of wfs
50[max 75]
Throughput [4hr Process]
#of wfs/mo
9000
Temp Control
#of zones
4
Temp Control method
TC
Spike, Profile, Cascade
Water Loading System
Manual / Auto
Mini Batch Vertical Furnace
Description
Product Inquiry
Purchase Product Catalog
Payment & Shipping Conditions:
- Payment: We accept payment through Paypal Only.
- Shipping: We will ship the catalog once the payment is received. And you will be receiving the catalog with in 10 -14 busines days. Shipping might be delayed in due to international shipping conditions which is depends on the countries receiveing. In case hard copy of catalog is not available then we will ship the soft copy.
- Refund: We can refund the order before shipping process was initiated. Incase Catalog not available, we will make sure to refund the order.
- Note: This is a Catalog Produt.
Share Mini Batch Vertical Furnace in Social Media