[EUCCK] Carl Zeiss Electron and Ion Beam M...

ORION® PLUSHelium Ion MicroscopeNext Generation Workstation for Nanoscale Research ORION® PLUSThe ORION® PLUS is the second generation helium ion microscope, providing superior surface- and high-resolution imaging even on challenging insulating materials and precision nanomodification capabilities. Helium Ion Microscopy complements existing microscopy techniques in the life sciences, materials sciences, and sets new record s in nanomodification applications. As an imaging highlight, its elegant charge neutralization capability yields ideal results from strongly insulating specimens, including uncoated biological specimens. Other applications take full advantage of the < 0.35 nm lateral resolution and high degree of surface sensitivity. For nanomodification applications, the ORION® PLUS has boldly demonstrated the ability to creat sub-10 nm features with ease. Proximity effects, and optical- and electrical contamination that potentially limit Gallium and electron approaches are a thing of the past. Emerging application areas include graphene nanoribbon research, plasmonics, nanopores, and more. The ORION® PLUS microscope is based on the revolutionary, atomic-sized, ALIS gas field ion source (GFIS). Emanating from a single atom, this remarkably bright and stable beam of helium ions overcomes the limitations of diffraction and energy spread that affect the electron beam used in scanning electron microscopes. ORION®PLUS Essential Specifications Resolution(Probe Size) = 0.35 nm Accelerating Voltage 10 kV-35 kV ± 5 kV Magnification 100x -1,000,000x Field of View 1mm-100nm Probe Current Range : 1fA-100pA Ion Source ALIS Gas Field Ion Source Process Chamber Volume 400mm3Base Vacuum 8 x 10-7 TorrCustomizable port plateLoadlock: Integrated Plasma Cleaner Image Detectors Everhart-ThornleyMicrochannel Plate Gas Injection System Pt, W, TEOS, other chemistries upon request.Integrated into the ORION® PLUS user interface Analytical Detector Spectra - Solid-state Backscattered Helium Spectroscopy.Materials analysis and thin film metrology Sample Stage 5-axis motorized stage,50 mm travel in X and Y, 12 mm Z, 360°, 0° to 45°tilt Vacuum System 300 L/sec Mag-Lev turbomolecular pumps backed with oil and particle free roughing pumps Video Cameras Two video monitoring cameras-Source View and Chamber View More information>> e-Book