Chemicals, Rubber & Plastics HomeProductsChemicals, Rubber & Plastics Inquiry Save to Favorites GO :::::Sort::::: Name Date Added Popular ↑ ↓ SIH4 Mono Silane "something different! so different!"SiH4 Mono Silane ? Application -Used for vapor deposition of silicon to poly-silicon, epitaxial, SiO2 and Si3N4 layer in producing semiconductor, TFT-LCD and solar cell. ? Specification Item Specification Purity SiH4 99.9999% (excluded H2) Impurity(ppmv) O2 + Ar < 1.0 N2 < 1.0 H2 < 20.0 CO < 0.1 CO2 < 0.1 THC < 0.1 H2O < 1.0 ? Package Type Material Filling Weight (Max.) Valve Connection Type 47L Mn Steel 12kg JIS 22L,DISS... Read More Inquiry Now Chemicals, Rubber & Plastics Made in Korea Other Organic Chemicals Made in Korea Mono Silane Made in Korea SiH2Cl2 Dichlorosilane "Something Different! So Different!"SiH2Cl2 Dichlorosilane ? Application -SiH2Cl2 is silicon precursor gas used in combination with ammonia for silicon nitride chemical vapor deposition (CVD). SiH2Cl2 is also used for epitaxial silicon deposition. ? Specification Specification Analyzer Purity SiH2Cl2 99.9% Impurity(ppmv) O2 + Ar = 1.0 GC N2 = 1.0 GC CO = 1.0 GC CO2 = 1.0 GC CH4 = 1.0 GC HC = 10.0 GC SiH3Cl = 500 GC SiHCl3 = 500 GC SiCl4 = 500 GC ?... Read More Inquiry Now Chemicals, Rubber & Plastics Made in Korea Other Organic Chemicals Made in Korea SiH2Cl2 Dichlorosilane Made in Korea