"something different! so different!"SiH4 Mono Silane
? Application
-Used for vapor deposition of silicon to poly-silicon, epitaxial, SiO2 and Si3N4 layer in producing semiconductor, TFT-LCD and solar cell.
? Specification
Item
Specification
Purity
SiH4
99.9999% (excluded H2)
Impurity(ppmv)
O2 + Ar
< 1.0
N2
< 1.0
H2
< 20.0
CO
< 0.1
CO2
< 0.1
THC
< 0.1
H2O
< 1.0
? Package
Type
Material
Filling Weight (Max.)
Valve Connection Type
47L
Mn Steel
12kg
JIS 22L,DISS...