Plasma surface treatment of various materials PECVD process
DLC coating
Siliocon coating from lignid source
Special Features
Batch type of NPPN system for a large area surface treatment(F1,000 x 2,000H).
Plasma nitriding system minimizing ion bombardment using a mesh type of cathode.
Automatically control with PC interface.
Convenient sample loading with sample tray.
Average throughput : Up to 120 ton per year.
Specification
Dimension : 2,870L X 3,411H X 2,400W (?)
Power : DC 30kW
Heater : F2, inconel heater
Gas : N2/Ar/CH4/H2/TMS/CxHX
Pump : Rotary(3,500l/min) & booster(1,200l/min)
Share Plasma Nitriding & PECVD System in Social Media