Specifications
System Size : 2,200mm(W)x950mm(D)x1,800mm(H)
Sample Size : Resolution : 30k
Control Panel : Raith Lithography Module
Probe Current : 1pA - 15nA
Acceleration Voltage : 30kV
Emitter : Ga Liquid metal ion source
Gas Injection System : Up to two different precursors
Stage : 5-axis stage
Detector : Everhart Thomley type SE detector
Chamber : 400 mm(W)x700mm(D)x440 mm (H)
Image Acquisition and Image Display :Resolution : 1,280x960 pixel Processing: pixel averaging, frame/line averaging and integration.
System Control :Integrated smart user interface based on Windows XP operating system, controlled by mouse, key board and control panel.
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