Vacuum Furnace for Display Materials Purification

Vacuum Furnace for Display Materials Purification

Vacuum Furnace for Display Materials Purification Made in Korea

Description

Display materials purification

differential evaporation of organic materials

Special Features

Vacuum furnace with four heating zones

Easily movable on rails

Quartz tube conveniently exchangeable

Plug system movable in x, y, z direction

Process range : 400 ~ 900°C

Operated by PLC touch screen

Average throughput : Up to 30,000 wafers per year

Specifications

Wafer capacity : 100 × 8"

Dimension : 2,500L × 1,500H × 6,00W (mm3)

Power : AC 220V, 2 phase

Gas : N2/Ar

Heater : KT APM molding heater (kanthal)(heating rate: 10°C/min, max. temp.:1000°C, deviation: negligible)

Pump: rotary(600 l/min) & turbo(350 l/s)


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