In-line Cathodic Vacuum Arc Deposition System Manufacturers,In-line Cathodic Vacuum Arc Deposition System Suppliers

Description

Coatings for PDP electrode protection(eg. MgO etc.)

Special Features

In-line system with 4 arc guns for dielectric materials deposition on 70 inch glass(base pressure: 1 X 10-6 Torr).

Equiped with mechanical, booster and cryogenic pumping system.

Automatically controlled in substrate moving.

Average throughput : Up to 30,000 sheets per year.

Specifications

Dimension : 3,000L X 2,000H X 1,000W (mm3)

Power : 4 power supplies for arc deposition(DC 200A/100V )

6 heaters for substrate heating(DC 35A/220V )

Heater : nichrome(heating rate: 50°C/min, max. temp.: 450°C,

temp. deviation : negligible

Gas : Ar / O2

Pump : rotary(1,000l/min) & booster(3,500l/min) & cryogenic(3,000l/s)

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