Vacuum Arc System with 8 Arc Guns Manufacturers,Vacuum Arc System with 8 Arc Guns Suppliers

Description

Hard materials coating(eg. CrN, TiN, TiAlN)

Anti-corrosive coating(eg. ZrN)

Special Features

Vacuum arc system for mass production(base pressure: 1 X 10-6 Torr).

Pumping system equiped with mechanical booster and oil diffusion pumps.

Automatically or manually controlled in substrate revolution and rotation.

Batch type of substrate loading.

Average throughput Up to 300,000 pcs per year.

Specifications

Dimension : 1,000L X 1,000H X 1,300W (mm3)

Power : DC 200A/100V 8ea for arc

DC 35A/1000V 1ea for heater

DC 20A/1000V 1ea for bias

Heater : molybdenum(heating rate: 30°C/min, max. temp.: 600°C, temp. deviation : negligible)

Gas : Ar / N2

Pump : rotary(1,500l/min) & booster(1,500l/min) & diffusion(5,000l/s)

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