CIGS Thin Film Solar Cell

Features CIGS 5000 Series as R&D equiprent for compound thin film solar cell is consist of Transfer, Load Lock, MBE, back contact Squttering and window sputtering Chambers. In CIGS series process Mo-back contact was deposited on a soda lime glass by sputtering system and the CIGS absorber layer over the Mo back contact growth technique using multi-source(Cu, In, Ga, Se) evaporation method. Then window layer consisted of ZnO or ITO thin film is coated by RF sputtering system. Specifications Deposition thickness up to several ten thousands A for Mo, CIGS and ZnO film Film thickness uniformity = ±5% on 100mm x 100mm substrate Film sheet resistance uniformity = ±5% on 100mm x 100mm substrate(for Mo film) In-situ temperature monitoring software of depositing CIGS film Temperature uniformity = ±3% on 100mm x 100mm substrate(on plate and Z-direction) Substrate Glass and flexible metal, 100mm x 100mm Deposition Mo film deposition by DC magnetron sputtering method CIGS film deposition by MBE Intrinsic and n type ZnO films by RF magnetron sputtering method Throughput 100mm x 100mm x 1 sheet/ batch, using by loadlock Vacuum chamber Six-Way Transfer chamber, Load Lock chamber, MBE chamber, Mo and ZnO sputtering chamber