Features
ILS5000 is industrial equipment for Solar Cell. ILS5000 System is comprised of several Chambers : Wafer Loading Stage, Load Lock, Trans Module, Buffer, Process chamber(ex. AI, AZO, ITO).
Application
Electronic components
FPD's
Solar cells
Others
Specifications
Type of transport : Batch In-Line system(Inter back)
Substrate size : 125mm x 125mm x 16PCS, 156mm x 156mm x 9PCS
Sputter Gun : Dual Magnetron Sputtering Source
Sputter Power : Pulse DC 20KW + RF 5KW
Temp. range : <200? in Process Chamber
Heat Uniformity : <±15°C
ITO Film Uniformity : <±5%(except the Edge 5mm)
Sheet Resistance : 50 Ohm/Square at 80mm ITO film thickness(Above condition is possible with heating process)
Transmittance on glass : More than 85% at 450mm to 1200mm(corning glass)
In Line Sputtering System
Description
Product Inquiry
Purchase Product Catalog
Payment & Shipping Conditions:
- Payment: We accept payment through Paypal Only.
- Shipping: We will ship the catalog once the payment is received. And you will be receiving the catalog with in 10 -14 busines days. Shipping might be delayed in due to international shipping conditions which is depends on the countries receiveing. In case hard copy of catalog is not available then we will ship the soft copy.
- Refund: We can refund the order before shipping process was initiated. Incase Catalog not available, we will make sure to refund the order.
- Note: This is a Catalog Produt.
Share In Line Sputtering System in Social Media