Feature Material : Urethane cake Ø 1,000mm Thickness Tolenrance after Slicin: within 0.005mm Wide Application for CMPPad Manufaturing Other Industrial equipments

Feature Fine Pressure Control System Precision processing that axis and product of prodessing time are correct in special quality because can control processing pressure impalpably and variously by method that pressurize or depressurize top board by air cylinder and accuracy. 4-Way Driving System When it process 4-Way method.It

Feature Solid Cast Iron Frame Excellent awing and vibration damping by original high rigidity machine construction. High precision spindle Smood of spindle for high machine stiffness and process precision & high precision and fast material removal. Pneumatic lift/pressure mechanism The pressure for any kinds & sizes of

Feature Rigid body stucture with solid casting High accuracy engraving of 0.003mm High engravinf speed PC base NC provides easy of use Versatile formats, various disply Simultaneous control up to 4 axis id performed by PC base numeric control AC servo system with high precision Application Semi-conductor field CMP pad

Feature High precision spindle For high machiine stiffness and process precision and excellent repeatability without black-lash. High precision work feeding system Newly upgraded work feeding system ensures micro unit pitch, a very fine dorwading pitch in a smooth manner with higher precision. It is therefore very easy to control